02-06
目录中文摘要及关键词.......................................................................1前言...................................................................................11原子力显微镜(AFM)........................................................21.1AFM的物理基础...........................................................21.2原子力显微镜的成像原理...................................................31.3原子力显微镜的主要构件和性能.............................................31.3.1激光器单元.............................................................31.3.2微悬臂单元.............................................................31.3.3压电扫描单元..........................................................41.3.4光电检测与反馈单元....................................................41.4原子...